Chapter 5 communications – INFICON SQC-310 Thin Film Deposition Controller User Manual
Page 71
Chapter 5
Communications
5-3
5.3 SQC-300 Command s
Get Model
Command:
@
Description: Returns the model number and software version number.
Parameters: None
Example:
The @ command returns “SQC-300 Ver 3.00”
Get/Set Film Parameters
Command:
A
Description: There are four film commands. A1 sets/gets the film name. A2 sets/gets
the main film edit screen parameters. A3 sets/gets the film conditioning parameters.
A4 sets/gets the deposit controls parameters.
To Get Film Parameters send the command (i.e. A1), a space, the film number, a
question mark, then a series of spaces and parameter numbers. You may include as
many parameters as you want, in whatever order you want. The format of the return
string is a series of parameter numbers, a comma, and its value, separated by spaces.
To Set Film Parameters send the command, a space, the film number, then a series of
parameter numbers, a comma, and the parameter value.
Parameters: A1: FilmName
A2:
1
P Term
7
Crystal Quality
2
I Term
8
Crystal Stability
3
D Term
9
Xtal Fail Mode
4
Material #
5
6
Tooling
A3:
1
Ramp1 Power
7
Idle Power
2
Ramp1 Time
8
Idle Ramp
3
Soak1 Time
9
Feed Power
4
Ramp2 Power
10
Feed Ramp
5
Ramp2 Time
11
Feed Time
6
Soak2 Time
A4:
1
Shutter Delay
5
Rate Sampling (0,1,2)