INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 72)

Chapter 5 Communications
5-4
2 Capture 6 Sample Accuracy
3 Control Error (0,1,2) 7 Sample Hold
4 Control Percent 8 Sample Time
Example: To Get the P I D parameters of Film 1, send: A2 1? 1 2 3
The return string would be of the form: 1,50 2,5 3,0
To Set the PID parameters of Film 1, send: A2 1 1,50 2,5 3,0
Note: Numeric film parameter values sent and received by the SQC-300 are
integers. To convert between the integer value and the parameter’s actual value, you
must multiply or divide by the number of decimal digits in the displayed parameter.
In the examples above the P term is displayed as an integer value, so no conversion is
required. However, the I Term is displayed with one decimal digit (i.e. 0.5). A Get
response of 5 actually represents a parameter value of .5. Similarly, a Set value of 5 for
the I Term sets its value in the SQC-300 to .5.
Get/Set System Parameters
Command: B
Description: Gets/Sets the system parameters screen values. The format is similar to
Get/Set Film Parameters. See the examples below.
Parameters: 1 Period 8 Scale 1
2 System Tooling 9 Scale 2
3 Xtal Tool 1 10 Scale 3
4 Xtal Tool 2 11 Scale 4
5 Simulate Mode 12 Xtal Tool 3
6 Min. Frequency 13 Xtal Tool 4
7 Max. Frequency
Example: To Get the Xtal Tool 1 and Xtal Tool 2, send: B? 3 4
The return string would be of the form: 3,100 4,100
To Set the parameters you would send: B 3,100 4,100