INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 43)

Chapter 3 Menus
3-5
3.4 Quick Setup Menu
The Quick Setup Menu provides access to the most commonly adjusted parameters for
the current process and layer.
F n l T h k
I T e rm
D T e rm
M a x. P o w e r
S le w R a te
M a te ria l
D e n s ity 2 .7 3
A lu m in u m
9 9 .0
9 9 .0
0 .0
0 .1
3 .0
g m /cm ^2
%
S e c .
S e c .
k A
Q u ic k E d it M e n u
N e x t
L a y e r
T o
M a in
E d it
P ro ce ss 1 --> L a ye r 1 --> F ilm 1
P a ra m e te r V a lu e U n its
In it R a te 0 .2 A /s
P T e rm 7 0 N o n e
Z fa c to r 1 .0 0
%
To
Main Returns to the Main Screen Menu 1.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Prev Layer Displays the parameters for the previous layer in the process.
Next Layer Displays the parameters for the next layer in the process.
Quick Setup parameters are described below:
Initial Rate: The beginning rate of deposition for this layer.
Final Thickness: The desired final thickness of this layer. The deposition phase of this
layer will end when this thickness is reached.
P Term: Sets the gain of the control loop. High gains yield more responsive (but