INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 24)

Chapter 2 Operation
2-5
2.3 Defining a Process
To define a process, press Next Menu until the Process Menu SoftKey is shown. Press
Process Menu. A list of 100 processes (or ) will be displayed. To define a
new process, scroll to and press Create. A new Process# is added to the list
of existing processes (use the SQC-300 setup software to assign descriptive process
names).
Press Select, then Edit to display the sequence of layers and films that comprise the
selected process. To add the first layer, press Insert Layer. Select a film from the films
screen and press Insert Layer. To add more layers, scroll to below the last layer and
press Insert Layer. Layers are always added above the selected layer.
To insert a layer in a sequence of layers, scroll to below the desired location in the layer
sequence, and press Insert Layer. Select a film from the list and press Insert Normal
to insert the new layer above the selected layer. The selected layer and subsequent
layers will be shifted down.
Hint: When building a process it may be easiest to add a “dummy” last layer and keep
inserting above that layer. When the process is complete, delete the “dummy” layer.
To add a Codeposited film to an existing layer, scroll to below the desired Co-deposition
layer. Press Insert Layer, select the desired film, then press Insert Codep. The
Codeposited film will be inserted in the layer above the selected layer, and indented to
show that it is a Co-deposition film.
The display below shows two films being Codeposited with Film1, then a fourth film
being deposited as an additional layer. While layers are always numbered sequentially,
the films are sequential only for this example. Any film can be used in any layer.
Layer Select Menu
Insert
Layer
To
Main
Prev
Menu
Process 25 -> Layer 1 -> Film 1
Layer
Film1
Film
Layer 1.1
Edit
Cut /
Paste
Layer 1.2 Film2
Layer 1.3 Film3
Layer 2.1 Film4