INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 13)

Chapter 1 Quick Start
1-7
The six SoftKey legends along the left side of the screen will change, depending on the
status of the process and the functions you select. Press Next Menu to display
alternate main screen menus:
Main Menu 1 Main Menu 2 Main Menu 3
Next
Layer
Start
Zero
Auto /
M anual
Next
M enu
Quick
Edit
Start
Next
Layer
Sensor
Info
Next
Display
Next
Graph
Next
M enu
Start
System
Param s
Film
M enu
Process
M enu
Next
M enu
Zero the thickness
reading on all
channels.
Switch between PID
and Manual power
control.
Access the m ost
com m only edited
settings.
Select the next layer
in the process.
Start or Stop the
selected layer.
Switch graph between
rate, deviation, and
power.
Switch the readout
below the graph.
Display detailed
sensor inform ation.
Select the next layer
in the process.
Start or Abort the
process.
Start the selected
layer.
Modify instrum ent
related settings.
Create or edit film s to
be used as layers.
Create or edit process
layers.
Third m enu available only
when process is stopped.
Main Menu 1 Main Menu 2 Main Menu 3
Because Main Menu 3 provides access to functions that can completely redefine a
process, it is available only when the process is stopped.
Spend some time now moving between the three menus. Pay particular attention to the
effects that the Main Menu 2 selections have on the display. We will cover the setup
parameters of Main Menu 3 in the Building a Process section.