INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 14)

Chapter 1 Quick Start
1-8
1.6 Thin Film Depositio n Overview
The SQC-300 stores the recipes, and provides the operating functions, required to
control thin film deposition processes. A typical thin film deposition cycle is shown
below.
The cycle can be broken into three distinct phases:
 Pre-conditioning (ramp/soak)
 Deposition
 Post-conditioning (feed/idle)
During pre-conditioning, power is supplied in steps to prepare the evaporation source
for deposition. Once the material is near the desired deposition rate, material
deposition begins.
During deposition, the PID loop adjusts the evaporation source power as required to
maintain the desired rate. In Co-deposition multiple films can be deposited
simultaneously.
When the desired thickness is reached, the evaporation source is set to idle power. At
this point the process may be complete, or deposition of another layer may begin.