INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 76)

Chapter 5 Communications
5-8
The return string for Start Layer and Stop Layer would be: 1,3 2,4
To Set the same parameters you would send: G1 1,3 2,4
Get/Set Relay Parameters
Command: H
Description: Gets/Sets the logical function of each of the 16 relays.
Parameters: 1 Source 1 Shutter 21 Max. Power
2 Source 2 Shutter 22 Stopped
3 Source 3 Shutter 23 Time Setpoint
4 Source 4 Shutter 24 Thick Limit
5-8 Sensor 1-4 Shutter 25 Final Thickness
9-12 Sensor 1-4 Fail 26 Dual Xtal 1/2 Shutter
13 All Crystals Good 27 Dual Xtal 3/4 Shutter
14 All Crystals Bad 28-35 Out1 Pocket 1-8
15 Process Hold 36-43 Out1 Pocket 1-8
16 Deposit Phase 44-51 Out1 Pocket 1-8
17 PreCond Phase 52-59 Out1 Pocket 1-8
18 SoakHold Phase 60 Not Used
19 Process Active
20 Manual Mode
Example: To Get Relay 1 and Relay 2 functions, send: H? 1 2
The return for Source 1 Shutter and Sensor 1 Shutter would be: 1,1 2,5
To Set the same parameters you would send: H1 1,1 2,5
Get Num Channels
Command: J
Description: Returns the number sensor/output channels installed.
Parameters: None
Example: The J command returns either 2 or 4.