Maintenance schedule, 3 maintenance schedule – INFICON LDS3000 Modular Leak Detector User Manual
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Maintenance
7.3
Maintenance schedule
Failure to perform the maintenance work specified in the maintenance schedule will
void the warranty granted on the mass spectrometer module LDS3000.
Danger to life due to electric shock
Inside the unit there are voltages of considerable magnitude. Touching parts where
electric voltage is present can result in death.
► Disconnect the unit from the power supply prior to any maintenance work.
Material damage due to unclean working conditions
Unclean working conditions can damage the unit.
► Make sure that the working environment is clean and you use clean tools
whenever performing any maintenance work.
Maintenance
steps
Operating hours [hrs] / time period
[years]
Service
level
Spare part
no.
24
2000 8000 16000 24000 36000
1/4 a
1 a
2 a
3 a
Turbo molecular pump
Change operating
fluid reservoir
X
2
II and III 200003801
Replace bearing
(recommended)
X
2
III
Clean fan and
check for proper
operation
1
I and II
Accessories
Clean sniffer valve
X
III
Calibrate internal
test leak
X
2
III
Internal calibration
Perform internal
calibration
X
1
I
External calibration
Perform external
calibration
X
1
I
Leak test MS module
Perform helium leak
test on MS module
X
III
X:
based on operating hours or time period
X
1
:
based on operating hours
X
2
:
based on time period
1:
depending on environment and use