beautypg.com

Maintenance schedule, 3 maintenance schedule – INFICON LDS3000 Modular Leak Detector User Manual

Page 44

background image

44

Maintenance

7.3

Maintenance schedule

Failure to perform the maintenance work specified in the maintenance schedule will
void the warranty granted on the mass spectrometer module LDS3000.

Danger to life due to electric shock

Inside the unit there are voltages of considerable magnitude. Touching parts where
electric voltage is present can result in death.
► Disconnect the unit from the power supply prior to any maintenance work.

Material damage due to unclean working conditions

Unclean working conditions can damage the unit.
► Make sure that the working environment is clean and you use clean tools

whenever performing any maintenance work.

Maintenance
steps

Operating hours [hrs] / time period

[years]

Service

level

Spare part

no.

24

2000 8000 16000 24000 36000
1/4 a

1 a

2 a

3 a

Turbo molecular pump

Change operating
fluid reservoir

X

2

II and III 200003801

Replace bearing
(recommended)

X

2

III

Clean fan and
check for proper
operation

1

I and II

Accessories

Clean sniffer valve

X

III

Calibrate internal
test leak

X

2

III

Internal calibration

Perform internal
calibration

X

1

I

External calibration

Perform external
calibration

X

1

I

Leak test MS module

Perform helium leak
test on MS module

X

III

X:

based on operating hours or time period

X

1

:

based on operating hours

X

2

:

based on time period

1:

depending on environment and use