INFICON LDS3000 Modular Leak Detector - Manual (Page 33)

Operation 33
6.10.1 Internal calibration
 Internal test leak connected.
1 Enter leakage rate of the test leak via digital interface (control unit CU1000,
I/O module IO1000 or bus module BM1000).
2 Start calibration.
 Calibration is performed automatically.
6.10.2 External calibration
 Vacuum mode: External test leak installed and open in or on the test system.
 Sniffer mode: Sniffer line measures sniffer leak.
1 Enter leakage rate of the external test leak via digital interface (control
unit CU1000, I/O module IO1000 or bus module BM1000).
2 Wait until leakage rate signal is tuned and stable.
3 Start calibration.
 Request C
LOSE TEST LEAK
4 Vacuum mode: Close test leak inside the test system.
5 Sniffer mode: Remove sniffer line from sniffer leak.
 Leakage rate signal decreases.
6 Confirm measured background value is stable.
6.10.2.1 External dynamic calibration
 Vacuum mode: External test leak installed and open in or on the test system.
 Sniffer mode: Sniffer line measures sniffer leak.
1 Enter leakage rate of the external test leak via digital interface (control
unit CU1000, I/O module IO1000 or bus module BM1000).
2 Wait until leakage rate signal is tuned and stable.
3 If you wish to apply non-tuned leakage rate signal: Start calibration.
 This leakage rate signal will be used for the calibration.
 Request C
LOSE TEST LEAK .
4 To determine the helium background, close the inlet valve on the test system.
 Leakage rate signal decreases.
5 Confirm significantly decreased leakage rate signal.