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INFICON LDS3000 Modular Leak Detector User Manual

Page 39

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Operation

39

360

W

Preamp output too low
(preamp voltage [V])

31

123

<-70 mV
at
500 GΩ

Poor ion source or
contaminated mass
spectrometer

361

W

Preamp offset too high
(Offset [V])

31

123

>+/-50 mV
at 500 GΩ,
>+/-10 mV
at 15 GΩ,
<+/-10 mV
at 470 MΩ,
<+/-9 mV
at 13 MΩ

Pre-amplifier defective

362

W

Preamp range error
(preamp voltage [V])

31

123

Pre-amplifier or MSB box
defective

390

W

500 G out of range,
(resistor [Ω])

31

123

450 GΩ
550 GΩ

Pre-amplifier defective,
error at the suppressor, IF
board or MSB defective

4xx TMP error (also temperature)

400

E

Error number of TMP,
(No. from TMP)

49

15

402

E

No communication with
TMP

49

15

Cable to TMP / TMP
defective, IF board or MSB
defective

403

E

TMP speed too low,
(TMP speed [Hz])

53

142

< 95%
Nom.
Value

Pressure too high, TMP
defective

404

E

TMP current too high,
(current [A])

49

2

3A

405

E

No runup TMP

60

61

5 Min.

Pressure too high, TMP
faulty

410

E

TMP temperature too
high,
(No. from TMP)

49

2

61°C

TMP Err044, Err045,
Err117, Err118, Wrn119,
Wrn143

411

W

TMP temperature high,
(No. from TMP)

49

2

60°C

TMP Wrn045, Wrn076,
Err117, Err118, Err119,
Err143

420

E

TMP voltage too high,
(No. from TMP)

49

2

TMP Err002 at approx. 30V

422

E

TMP no run up,
(No. from TMP)

49

2

8 Min. TMP Err006

423

W

TMP pressure rise,
(No. from TMP)

49

2

TMP Wrn168

Error

number

Warning/

Error

Error message
LDS3000

Error

number

LDS1000

protocol

Error

number

ASCII

protocol*

Limit
values

Cause