INFICON LDS3000 Modular Leak Detector User Manual
Page 39
Operation
39
360
W
Preamp output too low
(preamp voltage [V])
31
123
<-70 mV
at
500 GΩ
Poor ion source or
contaminated mass
spectrometer
361
W
Preamp offset too high
(Offset [V])
31
123
>+/-50 mV
at 500 GΩ,
>+/-10 mV
at 15 GΩ,
<+/-10 mV
at 470 MΩ,
<+/-9 mV
at 13 MΩ
Pre-amplifier defective
362
W
Preamp range error
(preamp voltage [V])
31
123
Pre-amplifier or MSB box
defective
390
W
500 G out of range,
(resistor [Ω])
31
123
450 GΩ
550 GΩ
Pre-amplifier defective,
error at the suppressor, IF
board or MSB defective
4xx TMP error (also temperature)
400
E
Error number of TMP,
(No. from TMP)
49
15
402
E
No communication with
TMP
49
15
Cable to TMP / TMP
defective, IF board or MSB
defective
403
E
TMP speed too low,
(TMP speed [Hz])
53
142
< 95%
Nom.
Value
Pressure too high, TMP
defective
404
E
TMP current too high,
(current [A])
49
2
3A
405
E
No runup TMP
60
61
5 Min.
Pressure too high, TMP
faulty
410
E
TMP temperature too
high,
(No. from TMP)
49
2
61°C
TMP Err044, Err045,
Err117, Err118, Wrn119,
Wrn143
411
W
TMP temperature high,
(No. from TMP)
49
2
60°C
TMP Wrn045, Wrn076,
Err117, Err118, Err119,
Err143
420
E
TMP voltage too high,
(No. from TMP)
49
2
TMP Err002 at approx. 30V
422
E
TMP no run up,
(No. from TMP)
49
2
8 Min. TMP Err006
423
W
TMP pressure rise,
(No. from TMP)
49
2
TMP Wrn168
Error
number
Warning/
Error
Error message
LDS3000
Error
number
LDS1000
protocol
Error
number
ASCII
protocol*
Limit
values
Cause