INFICON XTC/3 Thin Film Deposition Controller Software Editor Operating Manual - Manual (Page 65)

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XTC/3 Editor Operating Manual
The following data are collected from the XTC/3 for each controller:
Rate . . . . . . . . . . . . . . . . . . . . . . . . . measured rate of accumulation.
Rate Deviation . . . . . . . . . . . . . . . . calculated from the difference of the
measured rate to the rate setpoint. From the
dropdown list, one can select Rate Dev +/- 5
Å/s,+/- 10 Å/s,+/- 20 Å/s or +/- 40 Å/s
NOTE: The Dev choices from the dropdown list are for the same data but
provide different choices of scale for the Y-axis.
Power. . . . . . . . . . . . . . . . . . . . . . . . The Power, in %, of the Channel control
output.
Thickness . . . . . . . . . . . . . . . . . . . . The Thickness in kÅ of the accumulation on
the substrate.
Frequency . . . . . . . . . . . . . . . . . . . . The Frequency in Hz of the active crystal.
Crystal Life . . . . . . . . . . . . . . . . . . . The Life in % of the active crystal.
NOTE: Refer to the XTC/3 Thin Film Deposition Controller Operating Manual (IPN
074-446-P1) for a more thorough understanding of the data parameters.
4.2.2 The Control Panel
The Control Panel provides a grid and buttons to control the display and collection
of data.
4.2.3 The Display Grid
A display can be removed from the view by unchecking the checkbox located at the
top of the grid. This is shown in
Figure 4-4 .
Figure 4-4 Grid Radio Buttons and Check boxes