INFICON XTC/3 Thin Film Deposition Controller Software Editor Operating Manual - Manual (Page 63)

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XTC/3 Editor Operating Manual
Chapter 4
Monitor
4.1 Introduction
The XTC/3 Editor includes a Monitor, which collects and stores six types of data:
Rate, Rate Deviation, Power, Thickness, Frequency and Crystal Life. Sensor
Status and State are also recorded. Monitor can also be used to recall data from
files, which can then be printed or output to an ASCII file for import into other
applications.
4.2 Starting Monitor
The Monitor function is started from Function >> Monitor of the program menu,
the Controller toolbar, or the Controller’s context menu (see
Figure 4-1 ).
Figure 4-1 Different Ways to Run Monitor
4.2.1 The Data Display
The Monitor window (see Figure 4-2 ) has four main components — the Trend
Graph, Menu and Toolbars and Data Grid/Control Panel — each of which can
be displayed or hidden to show the data as needed. The Trend Graph shows the
measurement as a function of time. The Data Grid/Control Panel shows the
intensities of the selected parameters at the Data Cursor. As the Data Cursor is
moved, the Data Grid and Trend Graph header will automatically be updated.
The data can be saved automatically, in files of a maximum size of 11MB, or when
the Snapshot icon is selected. All data can be saved by selecting Monitor >> Save
Data.