3 edit: auto/manual mode – INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual
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SQM-242 Operating Manual
3.3 Edit: Auto/Manual Mode
When Edit is clicked while Auto or Manual mode is selected, a dialog box is
displayed which contains additional output control settings.
NOTE: The type of dialog box displayed depends on whether the output is
configured as a control output (Auto/Manual/Off), or as a Recorder output.
See the next section for information on recorder outputs.
These controls are common to most dialog boxes in the program:
OK . . . . . . . . . . . . . . . . . . . . . . . . . . Saves the settings in the dialog box, sends
them to the SQM-242 card, and closes the
dialog box.
Cancel . . . . . . . . . . . . . . . . . . . . . . . Closes the dialog box without saving the
settings or sending them to the SQM-242
card.
Update . . . . . . . . . . . . . . . . . . . . . . . Saves the settings in the dialog box, sends
them to the SQM-242 card, but does not
close the dialog box.
Figure 3-2 Output Edit Dialog Box
Input. . . . . . . . . . . . . . . . . . . . . . . . . Selects the sensor(s) or analog input used as
an input to the output’s PID control loop.
Click Sensors to configure the loop for quartz sensor inputs. If more than one
sensor is selected, their averaged rate and thickness readings are used by the PID
control loop and displayed on the main dialog box.
If an analog input is selected, quartz sensors are disabled. Only a single analog
input can be selected. Analog inputs extend deposition control to non-quartz
sensor inputs.