3 sensors – INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual
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SQM-242 Operating Manual
1.6.3 Sensors
Front Load Single Sensor . . . . . . . . . . . . . . . . . . . . SL-XXXXX
Front Load Dual Sensor . . . . . . . . . . . . . . . . . . . . . . DL-AXXX
Cool Drawer Single Sensor . . . . . . . . . . . . . . . . . . . CDS-XXFXX
Cool Drawer Dual Sensor . . . . . . . . . . . . . . . . . . . . CDD-XFXX
Sputtering Sensor. . . . . . . . . . . . . . . . . . . . . . . . . . . 750-618-G1
Front Load UHV Bakeable Sensor. . . . . . . . . . . . . . BK-AXF
NOTE: All shuttered sensors require a feedthrough with an air line and a
pneumatic shutter actuator control valve.
Pneumatic Shutter Actuator Control Valve . . . . . . . . 750-420-G1
NOTE: Multi-crystal (rotary) sensors should not be used with the SQM-242
NOTE: Consult individual sensor manuals for part muber configurations.
- TGF10 Tracer Gas Filler (36 pages)
- Sensistor ILS500 F Leak Detection Filler (90 pages)
- T-Guard Leak Detection Sensor (85 pages)
- T-Guard Leak Detection Sensor Interface description (40 pages)
- Sensistor ISH2000P Hydrogen Leak Detector, Panel Model (51 pages)
- Sensistor ISH2000 HySpeed Hydrogen Leak Detector (54 pages)
- LDS3000 Modular Leak Detector (52 pages)
- LDS3000 Modular Leak Detector Interface description (56 pages)
- BM1000 Bus module (14 pages)
- I/O1000 I/O module (18 pages)
- CU1000 Control unit (24 pages)
- Helium Leak Detector Modul1000 (130 pages)
- Helium Leak Detector Modul1000 Interface description (40 pages)
- UL5000 Dry Helium Leak Detector (108 pages)
- UL5000 Dry Helium Leak Detector Interface description (14 pages)
- UL1000 Fab Dry Helium Leak Detector (119 pages)
- HLD6000 Refrigerant Leak Detector (76 pages)
- HLD6000 Refrigerant Leak Detector Interface Description (40 pages)
- IO1000 I/O module (18 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector (92 pages)
- Ecotec E3000 Multigas-Sniffer-Leak Detector Interface description (36 pages)
- Sensistor XRS9012 Hydrogen Leak Detector User Manual (28 pages)
- Sensistor XRS9012 Hydrogen Leak Detector Maintenance manual (14 pages)
- Extrima Ex-certified Hydrogen Leak Detector (62 pages)
- Sensistor ILS500 Leak Detection System (107 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (108 pages)
- Sensistor ISH2000 Hydrogen Leak Detector (58 pages)
- Sensistor Sentrac Hydrogen Leak Detector (86 pages)
- Protec P3000(XL) Helium Leak Detector (132 pages)
- Pilot Plus Vacuum Gauge (2 pages)
- CO Check Carbon Monoxide Meter (2 pages)
- GAS-Mate Combustible Gas Leak Detector (12 pages)
- Whisper Ultrasonic Leak Detector (8 pages)
- Vortex AC Refrigerant Recovery Machine 115V (20 pages)
- Vortex AC Refrigerant Recovery Machine 230V (16 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (2 pages)
- Wey-TEK Refrigerant Charging Scale & Optional Charging Module (44 pages)
- D-TEK CO2 Refrigerant Leak Detector (12 pages)
- TEK-Mate Refrigerant Leak Detector (12 pages)
- Compass Refrigerant Leak Detector (12 pages)
- D-TEK Select Refrigerant Leak Detector (12 pages)
- Explorer Portable Gas Chromatograph (369 pages)
- MicroFID II Portable Flame Ionization Detector (89 pages)
- DataFID Portable Flame Ionization Detector for Landfill Emissions Monitoring (91 pages)
- Hydrostik Hydrogen Fuel Cylinder Installation (7 pages)