INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 29)

3 - 1
IP
N 07
4-
54
9-
P1
A
SQM-242 Operating Manual
Chapter 3
SQM-242 CoDep
3.1 Introduction
The SQM-242 CoDep program illustrates most of the capabilities of the SQM-242
card. It is intended as a learning tool for new users, and a programming example
for interfacing to user applications.
3.2 Main Dialog Box
With no cards installed (or with two SQM-242 cards and an SAM-242 card
installed) you will see the dialog box shown in
Figure 3-1 . The number of "output
frames" shown will change depending on the number of cards installed in your
system. For example, with only one SQM-242 card installed, the main dialog box
shows only two output frames.
Figure 3-1 SQM-242 Codep Main Dialog Box
Each output frame corresponds to a physical output on an SQM-242 card. In Figure
3-1 , the first three outputs are each configured to use quartz sensors to measure
rate and thickness.
The frame labeled "Gas Flow" is a little different. This output uses an analog input
on the SAM-242 card to control backfill gas. The SAM-242 card can use any analog
voltage for control. More about this feature later.