INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 13)

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SQM-242 Operating Manual
Chapter 1
Introduction
1.1 Introduction
The SQM-242 Card is a powerful thin film deposition controller on a PCI card.
Significant features include:

Measure four 1 MHz to 10 MHz quartz crystal sensors simultaneously.
 Controls two deposition source supplies simultaneously (co-deposition).
 Install multiple cards for up to 24 sensors and 12 control outputs.
 Measure four +/- 10 V analog inputs with optional (SAM-242) piggyback card.
 Installs in any PC running Windows ® 98/2000/ME/XP/7-32-bit with a vacant
PCI slot.
 Interfaces to your program with Windows DLL and ActiveX ® interfaces.
 Sample Visual Basic ® and LabVIEW ™ programs with source code are included.
Figure 1-1 SQM-242 Deposition Control Card
The sample software included with SQM-242 card allows you to:

Co-deposit up to six materials, using up to eight sensors.
 Use analog inputs to control heaters, gas flow, and other process variables.
 Use outputs for recording rate, thickness, power, or voltage.
 Save film setup parameters and deposition data to disk.
 Simulate deposition for developing and testing film setups.