INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual

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SQM-242 Operating Manual

Output A1 above is turned off, while Output A2 is used as a recorder output. The
output labels are easily edited to provide descriptive names. Dialog boxes within
each output frame will change, depending on the function of that output.
Outputs configured for quartz sensor inputs, like the first three in the sample dialog
box, display rate and thickness information. The first display is the Thickness
Measurement for the material (in kÅ). Immediately below the Thickness
Measurement display is the Thickness Setpoint setting. You can edit the Thickness
Setpoint at any time. When the Thickness Reading reaches the Thickness
Setpoint, the deposition will stop.
NOTE: To adjust a Setpoint, click on the setting and type a new setting. Press

to send the setting without moving to another field. To move to
another field, use the key or your mouse. Each time you move to
another field, the setting is updated.

Below the thickness displays are the Rate Reading and Rate Setpoint displays (in
Å/s). In Auto mode, the SQM-242 control loop continuously adjusts the output
power to maintain the deposition Rate Reading at the desired Rate Setpoint.
Below the rate displays are the output Power Reading and manual Power Setpoint.
The Power Reading displays the current output power (in % Full Scale). In Manual
mode, the Power Setpoint can be edited to manually adjust output power.
The option buttons control the function of each output. As mentioned previously,
Auto mode uses a PID control loop to control rate. Manual mode, allows you to
manually adjust the output power. That can be useful for material preconditioning
or error conditions.
The Record button configures the output as an analog recorder. A recorder output
provides a signal that is proportional to thickness, rate, power, or analog voltage.
Finally, the Off button sets the output to 0 volts and hides the displays.
Start/Stop . . . . . . . . . . . . . . . . . . . . When Start is displayed, starts SQM-242

readings and PID output control. When Stop
is displayed, stops readings and sets the
power outputs to zero. When Stop is
displayed, a Hold button is also visible.

Hold/Resume . . . . . . . . . . . . . . . . . Clicking Hold sets all output power levels to

zero, and changes the button legend to
Resume. Clicking Resume continues
deposition without zeroing thickness.

Zero All . . . . . . . . . . . . . . . . . . . . . . Sets all material (i.e., output) thickness

readings to zero.

Zero . . . . . . . . . . . . . . . . . . . . . . . . . Sets the selected material thickness reading

to zero.

Edit . . . . . . . . . . . . . . . . . . . . . . . . . Displays a dialog box with additional settings

for an output.