INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual User Manual
Sqm-242, Thin film deposition controller
Table of contents
Document Outline
- Cover Page
- Title Page
- Trademarks
- Disclaimer
- Copyright
- Declaration Of Conformity
- Warranty
- Table Of Contents
- Chapter 1 Introduction
- 1.1 Introduction
- 1.2 Instrument Safety
- 1.3 How To Contact Customer Support
- 1.4 Specifications
- 1.4.1 SQM-242 Measurement
- 1.4.2 SAM-242 Inputs
- 1.4.3 SQM-242/SAM-242 Outputs
- 1.4.4 Setup Parameters
- 1.4.5 External Communications (SQS-242 only)
- 1.4.6 Computer Requirements
- 1.4.7 General Specifications
- 1.4.8 Operating Environment
- 1.4.9 Storage Temperature
- 1.4.10 Warm Up Period
- 1.4.11 Size
- 1.4.12 Connector Clearance Requirements
- 1.4.13 Weight
- 1.5 Unpacking and Inspection
- 1.6 Parts and Options Overview
- Chapter 2 Installation
- Chapter 3 SQM-242 CoDep
- Chapter 4 SQM-242 Monitor
- Chapter 5 SQM-242 Multi
- Chapter 6 Communications
- Chapter 7 Troubleshooting and Maintenance
- Chapter 8 Calibration
- Chapter 9 Measurement and Control Theory
- Appendix A Material Table