INFICON SQM-242 Thin Film Deposition Controller Card Operating Manual - Manual (Page 18)

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SQM-242 Operating Manual
1.4 Specifications
1.4.1 SQM-242 Measurement
Crystal Frequency . . . . . . . . . . . . . . . . 1.0 MHz to 10.0 MHz
Frequency Resolution . . . . . . . . . . . . . 0.06 Hz @ 6 MHz
Reference Frequency Accuracy. . . . 0.002%
Reference Frequency Stability . . . . . ±2 ppm (0-50°C)
Thickness & Rate Resolution . . . . . . 0.027 Е, 0.044 Е/s @ 2 readings/s,
material density = 2.7 gm/cc
Thickness Accuracy . . . . . . . . . . . . . dependent on process conditions, especially
sensor location, material stress, temperature
and density
Measurement Technique . . . . . . . . . Active Oscillation
Number of Sensor . . . . . . . . . . . . . . 4
1.4.2 SAM-242 Inputs
Number of inputs . . . . . . . . . . . . . . . 4, non-isolated
Connectors. . . . . . . . . . . . . . . . . . . . BNC
Input Range . . . . . . . . . . . . . . . . . . . 0 to ± 10 V (dc)
Input Impedance . . . . . . . . . . . . . . . 20 k Ω
Resolution . . . . . . . . . . . . . . . . . . . . 15 bit (plus sign)
1.4.3 SQM-242/SAM-242 Outputs
Number of inputs . . . . . . . . . . . . . . . 2, non-isolated
Connectors. . . . . . . . . . . . . . . . . . . . 1/4" Dual Phone Jack
Output Voltage . . . . . . . . . . . . . . . . . 0 to ±10 V (dc)
Source Impedance . . . . . . . . . . . . . . 1 k Ω
Resolution . . . . . . . . . . . . . . . . . . . . 15 bit (plus sign)
1.4.4 Setup Parameters
Material Density . . . . . . . . . . . . . . . . 0.4 to 99.99 gm/cc
Z-Ratio . . . . . . . . . . . . . . . . . . . . . . . 0.50 to 25.00
Sensor Tooling . . . . . . . . . . . . . . . . . 0 to 399%
Full Scale Voltage. . . . . . . . . . . . . . . 0 to ±10 V