INFICON BPG402-SE ATM to Ultra-High Vacuum Gauge (EtherCAT) User Manual
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tira93e1 (2014-04) BPG402-SE.cp
Contents
General Information
2
Intended Use
2
EtherCAT–Interface 2
Product Identification
2
Validity
3
Trademark 3
Contents 4
1
Technical Data
6
2
Interface Connection
7
3
Operation 8
3.1
Introduction 8
3.2
Front and Side View
8
3.3
Indicators and Switches
9
3.3.1
9
3.3.2
9
3.3.3
9
3.3.4
9
3.3.5
Device Address Switch
9
4
Object Structure
10
4.1
Object Dictionary structure
10
4.2
Communication Profile Objects (0x1000…0x1FFF)
11
4.3
Manufacturer-specific Profile Objects (0x2000...0x5FFF)
12
4.3.1
Manufacturer Configuration Module 1
12
4.3.2
Manufacturer Configuration Module 2
12
4.4
Input Area (0x6000…0x6FFF)
12
4.4.1
Input Common
12
4.4.2
Input Heat Transfer
12
4.4.3
Input Common
13
4.4.4
Input Hot Cathod Ion
13
4.4.5
Input Trip Point 1
14
4.5
Configuration Area (0x8000…0x8FFF)
15
4.5.1
Configuration Hot Cathode Ion
15
4.5.2
Configuration Trip Point 1
16
4.5.3
Configuration Trip Point 2
18
4.6
Information Area (0x9000…0x9FFF)
19
4.6.1
Information Heat Transfer
20
4.6.2
Information Common
21
4.6.3
Information Hot Cathode Ion
21
4.6.4
Information Trip Point 1/2
22
4.7
Device Area (0xF000...0xAFFF)
22
4.7.1
Semiconductor Device Profile
22
4.7.2
Module Profile List
22
4.7.3
Exceptions 22
4.7.4
Active Exception Status
22
4.7.5
Active Device Warning Details
23
4.7.6
Active Device Error Details
23
4.7.7
Latched Device Warning Details
24
4.7.8
Latched Device Error Details
24
4.7.9
Device Warning Mask
25
4.7.10
Device Error Mask
25
4.7.11
Comination Gauge
25
4.7.12
Trip Point Output All
26
4.7.13
Input Latch Local Timestamp
26
4.7.14
Configure Device
26
4.7.15
Information Device
27
4.7.16
Command Degas ON / OFF
28
4.7.17
Command Emission ON / OFF
28
4.7.18
Device Reset Command
29
4.7.19
Exception Reset Command
30
4.7.20
Store Parameters Command
30