INFICON BPG402-SE ATM to Ultra-High Vacuum Gauge (EtherCAT) - Manual (Page 32)

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tira93e1 (2014-04) BPG402-SE.cp
Appendix
 [1] www.inficon.com
Instruction Sheet
BPG402-S, BPG402-SD, BPG402-SE, BPG402-SL, BPG402-SP
tima46d1 (German)
tima46e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [2] www.inficon.com
Instruction Sheet
BPG402-SD, BPG402-SE, BPG402-SP
tima47d1 (German)
tima47e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [3] www.inficon.com
Operating Manual
BPG402-S, BPG402-SD, BPG402-SE, BPG402-SL, BPG402-SP
tina46d1 (German)
tina46e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
 [4] ETG.1000.2: Physical Layer service definition and protocol specification
 [5] ETG.1000.3: Data Link Layer service definition
 [6] ETG.1000.4: Data Link Layer protocol specification
 [7] ETG.1000.5: Application Layer service definition
 [8] ETG.1000.6: Application Layer protocol specification
 [9] ETG.1020: EtherCAT Protocol Enhancements
 [10] ETG.2000: EtherCAT Slave Information
 [11] ETG.5001.1: Modular Device Profile – Part 1: General MDP Device
Model
 [12] ETG.5003.1: Semiconductor Device profile – Part 1: Common Device
Profile (CDP)
 [13] ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge
 [14] IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications
 [15] IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3
 [16] SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATOR
NETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES
 [17] SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers
A: Literature