Validity trademark – INFICON BPG402-SE ATM to Ultra-High Vacuum Gauge (EtherCAT) User Manual
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tira93e1 (2014-04) BPG402-SE.cp
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This document applies to BPG402 with EtherCAT interface.
353-590
(DN 25 ISO-KF)
353-591
(DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document corres-
pond to the gauges with vacuum connection DN 25 ISO-KF. They apply to gauges
with the other vacuum connection by analogy.
We reserve the right to make technical changes without prior notice.
EtherCAT
®
Beckhoff Automation GmbH, Deutschland
Validity
Trademark
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