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Chapter 1 quick start, 4 system connections – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual

Page 9

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Chapter 1

Quick Start

1-7

1.4 System Connections

This section identifies typical system components and their connection:

System Components

Sensor

Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.

In-Vac Cable

A coaxial cable that connects the sensor to the feedthrough.

Feedthrough

Provides isolation between vacuum and atmosphere for
electrical and cooling lines.

6” BNC Cable

Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.

Oscillator

Contains the electronics to operate the quartz crystal. Total
cable length to the crystal should be under 40”.

Sensor Input
BNC Cable

Connects the oscillator to the SQC-122 input. Lengths up to
100’ are acceptable.

Control Output
BNC Cable

Connects the SQC-122 output to the evaporation source’s
control voltage input. Keep the length below 10’.

Ground Wire

A wire, typically braided, that connects the vacuum system to
the SQC-122 ground terminal.

S e n s o r

F e e d th ro u g h

In -V a c

C a b le

6 " B N C C a b le

O sc illa to r

S o u rc e
S h u tte r

G ro u n d W ire

S ens or 1

O utput 2

S e nso r 2

O utpu t 1

R e lay I/O 1 -4

10 0-12 0/20 0-240 V ~

50 /6 0 H z

25 V A

O ption A C ard

O ptio n B C ard

F use : 25 0V , .5A S B

R e la y I/O 5-8

R S -232

M a n u fa ctu re d By

in stru m e n ts

S ig m a

Σ

E va p o ra tio n S u p p ly

O u tp u t C o n tro l In p u t

B N C

C a b le s

S Q C -1 2 2