Chapter 1 quick start, 4 system connections – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual
Page 9
Chapter 1
Quick Start
1-7
1.4 System Connections
This section identifies typical system components and their connection:
System Components
Sensor
Holds the quartz crystal used to measure rate and thickness.
Crystals must be replaced occasionally.
In-Vac Cable
A coaxial cable that connects the sensor to the feedthrough.
Feedthrough
Provides isolation between vacuum and atmosphere for
electrical and cooling lines.
6” BNC Cable
Provides a flexible connection from the feedthrough to the
oscillator. Keep this cable as short as possible.
Oscillator
Contains the electronics to operate the quartz crystal. Total
cable length to the crystal should be under 40”.
Sensor Input
BNC Cable
Connects the oscillator to the SQC-122 input. Lengths up to
100’ are acceptable.
Control Output
BNC Cable
Connects the SQC-122 output to the evaporation source’s
control voltage input. Keep the length below 10’.
Ground Wire
A wire, typically braided, that connects the vacuum system to
the SQC-122 ground terminal.
S e n s o r
F e e d th ro u g h
In -V a c
C a b le
6 " B N C C a b le
O sc illa to r
S o u rc e
S h u tte r
G ro u n d W ire
S ens or 1
O utput 2
S e nso r 2
O utpu t 1
R e lay I/O 1 -4
10 0-12 0/20 0-240 V ~
50 /6 0 H z
25 V A
O ption A C ard
O ptio n B C ard
F use : 25 0V , .5A S B
R e la y I/O 5-8
R S -232
M a n u fa ctu re d By
in stru m e n ts
S ig m a
Σ
E va p o ra tio n S u p p ly
O u tp u t C o n tro l In p u t
B N C
C a b le s
S Q C -1 2 2