INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 16)

Chapter 2 Operation
2-19
The most commonly modified parameters are shown on the first film parameters screen.
Additional parameters can be accessed by pressing Film Conds (film conditioning) or
Deposit Controls.
I Term
Sensor 1
Sensor 2
O utput
Pocket
M ax Power
Slew Rate
Film Tooling
Crystal Quality Disabled
100
10.0
76.0
1
O ut1
O n
O n
0.7
%
%
O ut1/O ut2
O n/O ff
O n/O ff
Sec.
RATE(A/s)
0.0
Film Edit M enu
Film
Conds.
Deposit
Controls
Exit to
M ain
Prev
M enu
Edit
THICKNESS(kA)
0.000
PO W ER( % )
0.0
M y Process 1 Editing: Alum inum
Param eter Value Units
P Term 50 None
D Term 0.0 Sec.
Scroll to the end of the list (Z-Factor), then scroll back up to Material. Press Edit to
scroll through the list of available materials. Notice that the Density and Z-Factor are
updated automatically as a new material appears.
Select the desired material and press Enter. You could change the Density and Z-
Factor for the selected material now, but it is unlikely those values are wrong. To add a
material name that is not listed, you must use the SQC-122 setup software.
Once the material is selected, set up the source parameters. Scroll to Output and
select the SQC-122 rear panel output that is connected to the source evaporation
supply. If a source pocket indexer is being used, assign it also.
Now assign the Max Power and Slew Rate appropriate for this material and your power
supply. For now, set both to 100%. Set them to lower values later if you find that small
power changes cause excessively large changes in deposition rate.
The SQC-122 can use multiple sensors to measure a film’s deposition rate and
thickness. If multiple sensors are selected, an average of the sensors is used. Set
each sensor that will be used to measure this film to ON. Alternately, you might want to
use a dual shuttered sensor in case of crystal failures. See the Film Menu section of
Chapter 3 for instructions on setting up a primary/secondary dual sensor.