INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 19)

Chapter 2 Operation
2-19
2.3 Defining a Process
A process is a sequence of film layers deposited to achieve a particular thin film
characteristic. A few processes, each consisting of a few layers, may be adequate for a
production facility. For research or laboratory use, the SQC-122 can store up to 25
processes to a total of 250 layers.
You should define each of the films that will make up the layers of the process before
starting process definition. See the previous section for instructions on defining films.
To define a process, select Process Menu on the main screen. A list of 25 processes
(or ) will be displayed. To define a new process, scroll to and press
Create. A new Process# is added to the list of existing processes (use the SQC-122
setup software to assign descriptive process names). Press Select, then Edit to
display the sequence of layers and films that comprise the selected process.
To add a layer, scroll to the desired location in the layer sequence, and press Insert
Layer. Select a film for this layer from the list and press Enter. Once a film is assigned
to a process layer, you cannot change the film. Instead, cut the layer, then insert a new
layer and select the desired film. To edit a layer, highlight it, then press Edit.
Fnl Thk
Thickness Lim it
Start M ode
Start Thickness
Ram p Tim e
New Rate
Ram p2
Ram p1 Enabled
Disabled
3.5
0:00:30
0.150
Auto
0.400
0.500
En/Dis
En/Dis
kA
M an/Auto
kA
kA
RATE(A/s)
0.0
Layer Edit M enu
Exit to
M ain
Prev
M enu
Edit
THICKNESS(kA)
0.000
PO W ER( % )
0.0
M y Process 1 Layer 1 ->
Param eter Value Units
Init. Rate 5.0 A/s
Tim e Setpoint 0:01:00 h:m m :ss
h:m m :ss
A/s
Remember that most setup parameters are set in the Films Menu, and apply to every
instance where the film is used. The layer parameters pertain only to this instance of
the film, in this process.