INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 52)

Chapter 3 Menus
3-5
Descriptions of each system parameter follows:
Period: Sets the measurement period between .1 second (10 readings per second) and
1 second. A longer period gives higher reading accuracy, especially in low rate
applications.
System Tooling: Adjusts for overall sensor deposition rates that differ from the
measured substrate deposition rate.
Xtal Tooling 1: Adjusts for sensor deposition rates that differ from the measured
substrate deposition rate, because of sensor location. For example, if the sensor sees
only 50% of the substrate rate, set the value to 50%.
Xtal Tooling 2-6: Same function as described above. If the four sensor option card is
installed, Sensor 3 to 6 are also visible.
Simulate Mode: Normal mode uses the quartz crystals as inputs to the SQC-122 for
PID calculations and source output control. Simulate mode simulates the quartz
crystals based on the crystal frequencies set on this. Simulate mode is useful for
debugging process recipes.
Min/Max Frequency: The frequency values for the quartz crystal sensors used as
inputs to the SQC-122. The maximum frequency should be set to the frequency of a
new crystal, typically 6MHz. Sensor readings outside the min/max values cause an
error.
Scale 1 and Scale 2: The input voltage required by the deposition source power supply
to produce 100% output power. Positive or negative Scale 1,2 values are possible.
Contrast: Sets display contrast.
Dev Graph Limit: Sets the upper limit for the Rate Deviation graph Y axis.
Rate Alarm Low: Sets the % deviation below rate setpoint that causes an audible
alarm.
Rate Alarm High: Sets the % deviation above rate setpoint that causes an audible
alarm. The tone of the high rate alarm is lower than that of the low rate alarm.
Password Enable: If Password is enabled, the Quick Start, Film and System Menus
require a password. The Process Menu can be used to select a process, but a
password is required to make any changes on the Process Menu.
Password: If password is enabled, this parameter sets the sequence of SoftKeys to
press to enter menus. Press the desired sequence to set the password. Holding down
the top and bottom switch while powering up the SQC-122 sets the password to “1111.”