INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 12)

Chapter 1 Quick Start
1-7
Edit Mode To edit a setting in any menu, turn the control knob to scroll to
the desired setting, then press the Edit SoftKey.
In Edit mode, the cursor moves to the setting value and the
SoftKey functions change to show:
Next: Store the parameter and move to next parameter for
editing.
Cancel: Stop editing and return the selected parameter to its
previous value.
Enter: Stop editing and save values for selected parameter.
In Edit mode, adjust the control knob to set the desired
parameter value.
Edit
Layer 1 Spend some time navigating through the Quick Setup
parameters and editing values. When you are comfortable, be
sure your values for Layer 1 match those shown below.
Fnl Thk
I Term
D Term
S ensor 1
S ensor 2
O utput
M ax. P ow er
S lew R ate
M aterial C opper
10.0
76.0
O ut1
O n
O n
0.0
0.7
0.101
%
%
O ut1/O ut2
O n/O ff
O n/O ff
S ec.
S ec.
kA
R A TE (A /s)
0.0
Q uick S etup M enu
N ext
Layer
E xit to
M ain
E dit
TH IC K N E S S (kA )
0.000
P O W E R ( % )
0.0
M y P rocess 1 -> Layer 1 ->
P aram eter V alue U nits
Init R ate 11.1 A /s
P Term 50 N one
Exit to Main Press Exit to Main to return to the main screen.