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Chapter 3 menus – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual

Page 42

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Chapter 3

Menus

3-5

Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that
are desired for this layer. The Layer Edit Menu provides access to these layer
parameters:

Fnl T hk

T hickn ess Lim it

S tart M ode

R am p 1

S tart T hkness

R am p T im e

N ew R ate

R am p 2

D isabled

99.0

0:1 0:00

4.500

E nabled

M anu al

0.0 00

9.0 00

E n /D is

A /s

h:m m :ss

kA

E n /D is

A uto/M a n.

A

kA

R A T E (A /s)

0.0

E d it L a yer M en u

E xit to

M ain

P rev

M en u

E d it

T H IC K N E S S (kA )

0.000

P O W E R ( % )

0.0

M y P rocess 2 -> L ayer 2 -> A lum inum O xide

P aram eter

V alue

U nits

Init R a te

9.9

A /s

T im e S etpoint

0:0 0:00

h:m m :ss

Exit to Main

Returns to the Main Menu.

Prev Menu

Returns to the Layer Select Menu.

Edit

Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.

Control Knob

Scrolls through the list of layer parameters.