INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 36)

Chapter 3 Menus
3-5
The Main Screen SoftKeys undergo subtle changes based on the current process
status. The table below describes the function of each of the possible SoftKeys on the
Main Screen.
Next
Menu Displays additional Main Menu options as described in Section
3.2.
Quick
Setup Displays the Quick Setup Menu of commonly changed process
values.
Process
Menu Create, delete, and edit up to 25 processes. Also used to
select the currently active process. When a process is running,
this selection is not available.
Film
Menu Create, delete, and edit up to 25 films. A film is basically a
material, and may appear in several processes.
System
Params Sets system-wide operating parameters. Also used to “map”
the 8 digital inputs and 8 relays to process functions.
Start
Layer Each layer in a process can be defined as auto start or manual
start. Auto start layers begin immediately on completion of the
previous layer. Manual start layers wait for the operator to
press the Start Layer SoftKey.
Restart / StartNxt
Layer During deposition, it may be necessary to halt a layer to correct
a problem. These two SoftKeys allow the operator to either
restart the current layer or skip to the next layer.
Stop
Layer Temporarily halts deposition. Deposition is restarted with the
Restart or Start Nxt keys.
Start/Abort Starts or aborts sequencing through the current process layers
and deposition cycles. Abort sets both outputs to zero, and
abandons the current process.