INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 35)

Chapter 3 Menus
3-5
3.1 Main Menu
The default, power-up Main Screen display is shown below.
THIC K N ES S(kA)
0.000
R A TE(A /s)
0.0
PO W ER ( % )
0.0
Film : A lum inum
Layer : 1 of 25
P rocess : M y Process 1
Layer R ate : 11.1
Final Thick : 0.1011
R u n Tim e : 0:00:00
P H A S E: S topped
100.0
50.0
0.0
0.0 25.0 50.0
Pow er ( % vs. T im e)
N ext
M enu
Q uick
S etup
P rocess
M enu
Film
M enu
System
Param s
Start
12.5 37.5
M ain S creen
The measured Thickness, Rate, and output Power values are always displayed along
the top of the screen.
The graph displays either Rate, Rate Deviation, or output Power. The next section of
the manual describes graph selection.
The status bar below the graph displays the current deposition phase. In Manual mode,
Manual Power is displayed in the status bar. In Auto mode, the status bar will
automatically sequence through the pre-condition, deposit, and feed/idle phases for
each layer, as defined by the Process setup.
Below the status bar, important settings for the current process are shown. The next
section explains other parameters that can be displayed in this screen area.