INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 4)

Table of Contents
Chapter 1 Quick Start
1.0 Introduction...................................................................................................... 1-1
1.1 Thin Film Process Overview ............................................................................ 1-1
1.2 System Connections........................................................................................ 1-2
1.3 Front Panel ...................................................................................................... 1-3
1.4 Rear Panel....................................................................................................... 1-4
1.5 Installation ....................................................................................................... 1-5
1.6 Process Setup ................................................................................................. 1-6
1.7 Depositing a Film............................................................................................. 1-8
Chapter 2 Operation
2.0 Introduction...................................................................................................... 2-1
2.1 Definitions........................................................................................................ 2-1
2.2 Defining a Film................................................................................................. 2-1
2.3 Defining a Process .......................................................................................... 2-5
2.4 Sensor Setup................................................................................................... 2-7
2.5 Source Setup................................................................................................... 2-10
2.6 Running a Process .......................................................................................... 2-11
2.7 Loop Tuning..................................................................................................... 2-15
2.8 Troubleshooting............................................................................................... 2-17
Chapter 3 Menus
3.0 Introduction...................................................................................................... 3-1
3.1 Main Menu....................................................................................................... 3-2
3.2 Next Menus ..................................................................................................... 3-4
3.3 Quick Setup Menu ........................................................................................... 3-5
3.4 Process Menus................................................................................................ 3-7
3.5 Film Menus ...................................................................................................... 3-11
3.6 System Parameters Menu ............................................................................... 3-18
3.7 I/O Setup. ........................................................................................................ 3-21
Chapter 4 Options
4.0 Introduction...................................................................................................... 4-1
4.1 Option Card Installation ................................................................................... 4-1
4.2 Four Sensor Card Configuration...................................................................... 4-1
4.3 Full Rack Extender Installation ........................................................................ 4-2