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Chapter 1 quick start, 6 process setup – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual

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Chapter 1

Quick Start

1-7

1.6 Process Setup

Follow these steps to build a process from the main (also called “power up”) screen.

Note: If you are prompted for a password, use the switches along the left of the screen
to enter the password. The top switch is “1”, the bottom switch is “6”. If you forget the
password, see the System Parameters section for password setup.

Power
On

Move the rear panel power switch to the On (|) position. The
SQC-122 will briefly display its initialization information, then go
to normal operating mode.

Select
Quick Setup

Press the Quick Setup SoftKey to view the quick setup
parameters for the current process.

If no Quick Setup option is visible, no processes are defined in
the SQC-122. In that case, press Film Menu, then scroll the
cursor until an film is selected. Press Create to
create a new film, then press Main Screen. Now press
Process Menu, then Create, then Edit. Select Insert Layer,
scroll to your new film and press Enter. Now press Prev Menu
twice to return to the Main Menu.

THIC K N ES S(kA)

0.000

R A TE(A /s)

0.0

PO W ER ( % )

0.0

Film : A lum inum

Layer : 1 of 1

P rocess : M y Process 1

Layer R ate : 11.1

Final Thick : 0.1011

R u n Tim e : 0:00:00

P H A S E: S topped

100.0

50.0

0.0

0.0

25.0

50.0

Pow er ( % vs. T im e)

N ext

M enu

Q uick
S etup

P rocess

M enu

Film

M enu

System

Param s

Start

12.5

37.5

M ain S creen