INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 18)

Chapter 2 Operation
2-19
From the Film Conds menu, press Prev Menu to return to the main Film Params menu.
Now press Deposit Controls. The Deposit Controls menu contains parameters that
modify operation during the deposition phase.
Capture
Setting
Error
Rate Sampling
Setting
Accuracy Based
Undefined
(Cont,Time,Acc based)
18.0
Hold
20.0
%
%
RATE(A/s)
0.0
Deposition Controls Menu
Exit to
Main
Prev
Menu
Edit
THICKNESS(kA)
0.000
POWER(%)
0.0
Current: Process 1 EDITING: Film 1
Parameter Value Units
Shutter Delay 0:01:00 h:mm:ss
Control Error (Ignore, Stop, Hold)
0.0 %
Shutter delay causes the SQC-122 to delay opening the shutter until the process has
stabilized at the desired deposition rate. The time value is the maximum amount of time
to wait, before an error is sensed. Capture is the % rate deviation that must be
achieved to open the shutter and go to the Deposit phase. Capture will override the
shutter delay if accuracy is reached. Set Shutter Delay and Capture to zero to disable
this feature.
If the SQC-122 is unable to maintain the desired deposition rate (for example, out of
material or a bad sensor), one of three actions is possible. Keep trying (Ignore), set
power to zero to halt deposition (Stop), or maintain constant power (Hold) and
extrapolate thickness from the last good rate reading. Until your process is known and
stable, it is best to leave the Control Error setting on Ignore.
Rate sampling can extend sensor life in high rate processes. Select Cont (continuous)
to disable rate sampling. A Time selection closes the shutter for a fixed time, then
opens the shutter for a fixed time to sample the rate. Acc Based (accuracy based)
sampling closes the shutter for a fixed time, then opens the shutter until the desired rate
is achieved. Rate Sampling assumes a very stable process!
Each film parameter has been set. Press Exit to Main to return to the Main Screen.