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Appendix, B. specifications – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual

Page 59

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Appendix

Carbon Diamond

3.52

0.22

Samarium

7.54

0.89

Carbon Graphite

2.25

3.26

Scandium

3

0.91

Cerium Fluoride

6.16

1

Selenium

4.82

0.864

Cerium Oxide

7.13

1

Silicon

2.32

0.712

Chromium

7.2

0.305

Silicon Dioxide

2.2

1.07

Chromium Oxide

5.21

1

Silicon Oxide

2.13

0.87

Cobalt

8.71

0.343

Silver

10.5

0.529

Copper

8.93

0.437

Silver Bromide

6.47

1.18

Copper Sulfide

4.6

0.82

Silver Chloride

5.56

1.32

Copper Sulfide B

5.8

0.67

Sodium

0.97

4.8

Copper Sulfide A

5.6

0.69

Sodium Chloride

2.17

1.57

Dysprosium

8.54

0.6

Sulfur

2.07

2.29

Erbium

9.05

0.74

Tantalum

16.6

0.262

Gadolinium

7.89

0.67

Tantalum Oxide

8.2

0.3

Gallium

5.93

0.593

Tellurium

6.25

0.9

Gallium Arsenide

5.31

1.59

Terbium

8.27

0.66

Germanium

5.35

0.516

Thallium

11.85

1.55

Gold

19.3

.381

Thorium Fluoride

6.32

1

Hafnium

13.1

0.36

Tin

7.3

0.724

Hafnium Oxide

9.63

1

Titanium

4.5

0.628

Holnium

8.8

0.58

Titanium Oxide

4.9

1

Indium

7.3

0.841

Titanium Oxide IV

4.26

0.4

Indium Intimnide

5.76

0.769

Tungsten

19.3

0.163

Indium Oxide

7.18

1

Tungsten Carbide

15.6

0.151

Iridium

22.4

0.129

Uranium

18.7

0.238

Iron

7.86

0.349

Vanadium

5.96

0.53

Lanthanum

6.17

0.92

Ytterbium

6.98

1.13

Lanthanum Fluoride

5.94

1

Yttrium

4.34

0.835

Lanthanum Oxide

6.51

1

Yttrium Oxide

5.01

1

Lead

11.3

1.13

Zinc

7.04

0.514

Lead Sulfide

7.5

0.566

Zinc Oxide

5.61

0.556

Lithium

0.53

5.9

Zinc Selenide

5.26

0.722

Lithium Fluoride

2.64

0.774

Zinc Sulfide

4.09

0.775

Magnesium

1.74

1.61

Zirconium Oxide

5.6

1.001

Magnesium Fluoride

3

1

B. Specifications

Measurement
Number of Sensors
Frequency Range
Frequency Accuracy
Frequency Resolution
Rate Accuracy
Rate Resolution
Thickness Accuracy
Thickness Resolution
Measurement Period

2
4.0MHz to 6.0Mhz
.01% @ 2 rdgs/sec.
.1 Hz
.5% typical
.01/.1

Å/s

.5% typical
1

Å

.1 to 1 sec.