Appendix, B. specifications – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual
Page 59

Appendix
Carbon Diamond
3.52
0.22
Samarium
7.54
0.89
Carbon Graphite
2.25
3.26
Scandium
3
0.91
Cerium Fluoride
6.16
1
Selenium
4.82
0.864
Cerium Oxide
7.13
1
Silicon
2.32
0.712
Chromium
7.2
0.305
Silicon Dioxide
2.2
1.07
Chromium Oxide
5.21
1
Silicon Oxide
2.13
0.87
Cobalt
8.71
0.343
Silver
10.5
0.529
Copper
8.93
0.437
Silver Bromide
6.47
1.18
Copper Sulfide
4.6
0.82
Silver Chloride
5.56
1.32
Copper Sulfide B
5.8
0.67
Sodium
0.97
4.8
Copper Sulfide A
5.6
0.69
Sodium Chloride
2.17
1.57
Dysprosium
8.54
0.6
Sulfur
2.07
2.29
Erbium
9.05
0.74
Tantalum
16.6
0.262
Gadolinium
7.89
0.67
Tantalum Oxide
8.2
0.3
Gallium
5.93
0.593
Tellurium
6.25
0.9
Gallium Arsenide
5.31
1.59
Terbium
8.27
0.66
Germanium
5.35
0.516
Thallium
11.85
1.55
Gold
19.3
.381
Thorium Fluoride
6.32
1
Hafnium
13.1
0.36
Tin
7.3
0.724
Hafnium Oxide
9.63
1
Titanium
4.5
0.628
Holnium
8.8
0.58
Titanium Oxide
4.9
1
Indium
7.3
0.841
Titanium Oxide IV
4.26
0.4
Indium Intimnide
5.76
0.769
Tungsten
19.3
0.163
Indium Oxide
7.18
1
Tungsten Carbide
15.6
0.151
Iridium
22.4
0.129
Uranium
18.7
0.238
Iron
7.86
0.349
Vanadium
5.96
0.53
Lanthanum
6.17
0.92
Ytterbium
6.98
1.13
Lanthanum Fluoride
5.94
1
Yttrium
4.34
0.835
Lanthanum Oxide
6.51
1
Yttrium Oxide
5.01
1
Lead
11.3
1.13
Zinc
7.04
0.514
Lead Sulfide
7.5
0.566
Zinc Oxide
5.61
0.556
Lithium
0.53
5.9
Zinc Selenide
5.26
0.722
Lithium Fluoride
2.64
0.774
Zinc Sulfide
4.09
0.775
Magnesium
1.74
1.61
Zirconium Oxide
5.6
1.001
Magnesium Fluoride
3
1
B. Specifications
Measurement
Number of Sensors
Frequency Range
Frequency Accuracy
Frequency Resolution
Rate Accuracy
Rate Resolution
Thickness Accuracy
Thickness Resolution
Measurement Period
2
4.0MHz to 6.0Mhz
.01% @ 2 rdgs/sec.
.1 Hz
.5% typical
.01/.1
Å/s
.5% typical
1
Å
.1 to 1 sec.