Chapter 3 menus – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual
Page 46

Chapter 3
Menus
3-5
The Film Conds SoftKey displays these additional film conditioning settings: (Refer to
section 2.2 for definitions).
Exit to Main
Returns to the Main Menu.
Prev Menu
Returns to the Film Edit Menu.
Edit
Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Control Knob
Scrolls through the list of film conditioning parameters.
Ramp1 Time
Ramp2 Power
Ramp2 Time
Soak2 Time
Feed Power
Ramp Time
Feed Time
Idle Power
Ramp Time
0.950
2.90
0:00:00
10.0
75.0
Out1
On
On
0.7
%
h:mm:ss
h:mm:ss
%
h:mm:ss
h:mm:ss
%
h:mm:ss
RATE(A/s)
0.0
Film Conditioning Menu
Exit to
Main
Prev
Menu
Edit
THICKNESS(kA)
0.000
POWER(%)
0.0
My Process 1 Editing: Aluminum
Parameter
Value
Units
Ramp1 Power
50
%
Soak1 Time
0.0
h:mm:ss
h:mm:ss
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