INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 47)

Chapter 3 Menus
3-5
The Deposit Controls SoftKey displays these additional film settings: (Refer to section
2.2 for deposition control definitions.)
Exit to Main Returns to the Main Menu.
Prev Menu Returns to the Film Edit Menu.
Edit Selects the highlighted parameter for edit. SoftKey functions
change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and
move to next parameter.
Control Knob Scrolls through the list of deposition control parameters.
Capture
Setting
Error
Rate Sampling
Setting
Accuracy Based
Undefined
(Cont,Time,Acc based)
18.0
Hold
20.0
%
%
RATE(A/s)
0.0
Deposition Controls Menu
Exit to
Main
Prev
Menu
Edit
THICKNESS(kA)
0.000
POWER(%)
0.0
Current: Process 1 EDITING: Film 1
Parameter Value Units
Shutter Delay 0:01:00 h:mm:ss
Control Error (Ignore, Stop, Hold)
0.0 %