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Chapter 1 quick start, 3 rear panel – INFICON SQC-122 Thin Film Deposition Controller Operating Manual User Manual

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Chapter 1

Quick Start

1-7

1.3 Rear Panel

Rear Panel Connections

Sensor 1 & 2

Connects to quartz crystal sensor remote oscillator.

Output 1 & 2

Connects the SQC-122 output to your evaporation supply
control input.

Option A Card

Provides an additional four sensor measurement channels.
See Chapter 4 for information on installing the four sensor
option card.

Relay I/O (1-4)
Relay I/O (5-8)

Connects 8 relays and 8 digital inputs to external equipment for
process control. See Appendix C for connections.

RS-232

Connects to computer for programming and data acquisition.

Measurement ground terminal useful for common system and
cable grounding.

Power Input and
Voltage Selector

W

ARNING

: Select 115V for 100-120VAC, 230V for 200-

240VAC.

W

ARNING

: Use removable power cords only of the specified

type and rating, attached to a properly grounded receptacle.

S e n s o r 1

S e n s o r 2

R S -2 3 2

O p tio n A C a rd

O p tio n B C a rd

S ig m a

Σ

in s tru m e n ts

M a n u fa c tu re d B y

O u tp u t 1

O u tp u t 2

R e la y I/O 1 -4

R e la y I/O 5 -8

1 0 0 -1 2 0 /2 0 0 -2 4 0 V ~

5 0 /6 0 H z

2 5 V A

F u s e : 2 5 0 V , .5 A S B