INFICON SQC-122 Thin Film Deposition Controller Operating Manual - Manual (Page 61)

Appendix
# Rate Ramps 2
Rate Ramp Start 0.0 to 999.9
Å
Rate Ramp Time 0 to 1000 sec.
New Rate 0.0 to 999.9
Å/sec
Film Parameters (Film is a Material, plus these values)
Material
100 stored
Density 0.40 to 99.99 gm/cm
3
Z Factor 0.100 to 9.900
P Term 1 to 9999
I Term 0 to 99.9 sec.
D Term 0 to 99.9 sec.
Sensor (1,2) On/Off
Output 1 or 2
Max Power 0.0 to 100.0 %
Slew Rate 0.0 to 100.0 %/sec.
Ramp Time (1,2) 0 to 30000 sec.
Soak Power (1,2) 0.0 to 100.0 %
Soak Time (1,2) 0 to 30000 sec.
Feed Ramp Time 0 to 30000 sec.
Feed Power 0.0 to 100.0 %
Feed Time 0 to 30000 sec.
Idle Ramp Time 0 to 30000 sec.
Idle Power 0.0 to 100.0 %
Shutter Delay Time 0 to 200 sec.
Shutter Delay Error 0.0 to 30.0 %
Control Error Ignore/Stop/Hold
Control Error Setting 0 to 30.0 %
Rate Sampling Continuous/Time/Accuracy
Sample Time 10.0 to 999.0 sec.
Hold Time 10.0 to 999.0 sec.