Atec Agilent-E4980A - Manual (Page 15)

15
Calibration accuracy Acal
Calibration accuracy Acal is given below.
For impedance of DUT on the boundary line, apply the smaller value.
Table 23. Impedance range = 0.1, 1, 10 Ω
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.05 0.05 0.05 + 0.05 + 0.1 +
5 × 10 -5 Fm 5 × 10 -5 Fm 1 × 10 -4 Fm
θ [radian] 1 Ч 10 -4 2 Ч 10 -4 3 Ч 10 -4 3 Ч 10 -4 + 3 Ч 10 -4 + 6 Ч 10 -4 +
2 Ч 10 -7 Fm 2 × 10 -7 Fm 4 × 10 -7 Fm
Table 24. Impedance range = 100 Ω
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.05 0.05 0.05 + 0.05 + 0.1 +
5 × 10 -5 Fm 5 × 10 -5 Fm 1 × 10 -4 Fm
θ [radian] 1 Ч 10 -4 2 Ч 10 -4 3 Ч 10 -4 3 Ч 10 -4 3 Ч 10 -4 6 Ч 10 -4
Table 25. Impedance range = 300, 1 kΩ
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 0.03 0.05 0.05 0.05 0.1
θ [radian] 1 Ч 10 -4 1 Ч 10 -4 3 Ч 10 -4 3 Ч 10 -4 3 Ч 10 -4 6 Ч 10 -4
Table 26. Impedance range = 3 k, 10 kΩ
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 + 0.03 + 0.03 + 0.03 + 0.03 + 0.06 +
1 × 10 -4 Fm 1 × 10 -4 Fm 1 × 10 -4 Fm 1 × 10 -4 Fm 1 × 10 -4 Fm 2 × 10 -4 Fm
θ [radian] (100 + (100 + (100 + (100 + (100 + (200 +
2.5 Fm) × 10 -6 2.5 Fm) × 10 -6 2.5 Fm) × 10 -6 2.5 Fm) × 10 -6 2.5 Fm) × 10 -6 5 Fm) × 10 -6
Table 27. Impedance range = 30 k, 100 kΩ
Test frequency [Hz]
20 - 1 k 1 k - 10 k 10 k -100 k 100 k - 300 k 300 k - 1 M 1 M - 2 M
|Z| [%] 0.03 + 0.03 + 0.03 + 0.03 + 0.03 + 0.06 +
1 × 10 -3 Fm 1 × 10 -3 Fm 1 × 10 -3 Fm 1 × 10 -3 Fm 1 × 10 -4 Fm 2 × 10 -4 Fm
θ [radian] (100 + (100 + (100 + (100 + (100 + (200 +
20 Fm) × 10 -6 20 Fm) × 10 -6 20 Fm) × 10 -6 20 Fm) × 10 -6 2.5 Fm) × 10 -6 5 Fm) × 10 -6
Fm[kHz] Test frequency