INFICON Gemini ATM to Ultra-High Vacuum Gauge - Manual (Page 6)

6 tina83e1-a (2014-02)
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Scope of Delivery 5
1 Safety 8
1.1 Symbols Used 8
1.2 Personnel Qualifications 8
1.3 General Safety Instructions 9
1.4 Liability and Warranty 9
2 Technical Data 10
2.1 Measuring Signal vs. Pressure 15
2.2 Gas Type Dependence MAG50x 18
2.3 Gas Type Dependence MPG50x 20
3 Installation 23
3.1 Vacuum Connection 23
3.2 Power Connection 27
3.2.1 FCC 68, 8-pin Connector 28
3.2.2 D-Sub, 9-pin Connector 29
4 Operation 30
4.1 Status Indication MAG 30
4.2 Status Indication MPG 31
4.3 Put MAG50x Into Operation 32
4.4 Put MPG50x Into Operation 32
4.5 Gas Type Dependence 33
4.6 Ignition Delay 33
4.7 Contamination 34
5 Deinstallation 36
6 Maintenance, Repair 38
6.1 Adjusting the Gauge 38
6.2 Cleaning the Gauge / Replacing Parts 40
6.2.1 Troubleshooting (measuring chamber) 41
6.2.2 Replacing Ionization Chamber and Ignition Aid 43
6.2.3 Replacing Measuring Chamber 45