INFICON Gemini ATM to Ultra-High Vacuum Gauge - Manual (Page 20)

20 tina83e1-a (2014-02)
2.3 Gas Type Dependence MPG50x
Indication range from 10
2
… 10
-2
mbar
(Pirani-only operation)
Indicated pressure (gauge calibrated for air)
p [mbar]
p
eff
[mbar]
10 2
8
6
4
2
10 1
8
6
4
2
10 0
8
6
4
2
10 –1
8
6
4
2
10 –2
H
2
He Ne Air
N
2
O
2
CO
10 –3 2 4 6 10 –2 10 –1 10 0 10 1 10 2 8 2 4 6 8 2 4 6 8 2 4 6 8 2 4 6 8
Water vapor
Indication range
above 10
-2 mbar
Xe
Kr
Ar
CO
2
Freon 12