P = 10, U = c + 1.33 log p, Valid in the range 1×10 – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 16: Mbar < p < 1×10, Mbar 7.5×10, Torr < p < 7.5 ×10, Torr 1×10, Pressure p measurement signal u [v

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tina83e1-a (2014-02)

Measurement range 0.667 … 10 V (3MAx-xxx-0x0Q)

1E–01

1E+00

1E–06

1E–07

1E–08

1E–09

1E–10

0.0 0.5 1.0 1.5

2.5

3.5

4.5

5.5

6.5

7.5

8.5

9.5

10.5

2.0

3.0

4.0

5.0

6.0

7.0

8.0

9.0

10.0

Pressure p

Measurement signal U [V]

1E–02

1E–03

1E–04

1E–05

mbar

torr

0.667

rra

p = 10

0.75(U-c)

⇔

U = c + 1.33 log p

valid in the range 1×10

-9

mbar < p < 1×10

-2

mbar

7.5×10

-10

Torr < p < 7.5 ×10

-3

Torr

1×10

-7

Pa < p < 1 Pa

mbar Pa Torr

c 12.66 10 12.826

where p pressure

U measurement signal
c constant (pressure unit dependent)