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INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 49

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tina83e1-a (2014-02)

49

Corre

ction

Tur

n

on

pow

er

sup

p

ly

.

R

epl

ace i

oni

zati

on

ch

am

-

ber

or

m

eas

ur

ing c

h

am

-

ber

cpl

.(→

43

, 4

5

).

Sw

itch on

th

e hi

gh

vol

tag

e (

28)

.

Evacua

te the

vacu

um

system to <1

0

-2

m

bar

and

sw

itch the

ga

ug

e of

f a

nd

on a

gai

n vi

a "H

V ON

".

W

a

it, unti

l t

he

gas

di

s-

char

ge has

igni

te

d

(≈

5 m

inutes

at

a pr

ess

u

re

of 1

0

-9

mb

a

r).

Sw

itch th

e g

aug

e o

ff a

nd

on a

gai

n aft

e

r 5 s.

R

epl

ace the

ga

uge

.

R

epl

ace the

m

easur

in

g

cham

ber

c

p

l. (

45)

.

Possible

ca

use

No

su

pp

ly vo

ltag

e

.

Gaug

e co

ntam

in

ate

d

.

N

o

hi

gh

vol

ta

ge i

n th

e

m

easur

ing c

ham

be

r.

Over

pr

essur

e

in

th

e

m

easur

ing c

ham

be

r.

Gas

di

sch

ar

ge has not

igni

ted

.

EEPR

OM

er

ro

r.

M

easur

ing c

ham

be

r

severely co

ntamin

ate

d.

Status

signal

0

0

0

0

0

14.5

30 V

LED

off

lid

so

lid

gr

een

off

b

lin

kin

g

gr

een

off

lid

so

lid

gr

een

LED

off

lid

so

lid

gr

een

lid

so

lid

gr

een

lid

so

lid

gr

een

bl

in

ki

ng

red

lid

so

lid

gr

een

Problem

N

o

vol

ta

ge

at si

gnal

o

ut

put.

M

easur

ing si

gnal

unst

abl

e.

Vol

tag

e a

t si

gn

al

o

u

tp

ut

1.2

V (3MAx-xxx-0x0

N

)

0.4

V

(3MAx-xxx-0x0Q

).

Vol

tag

e a

t si

gn

al

o

u

tp

ut

con-

tinual

ly

< 0.3 V

(3MAx-xxx-0x0

N

)

< 0.5 V

(3MAx-xxx-0x0

Q

).

Si

gnal

c

onti

nual

ly

a

t a

ppr

ox.

10

-4

m

bar

.