P = 10, U = c + 0.6 log p, Valid in the range 1×10 – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 17: Pa < p < 1×10, Measurement signal u [v] pressure p

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tina83e1-a (2014-02)

Measurement range 1.398 … 8.6 V (3MBx-xxx-0x0P)

1E+04

1E+02

1E+00

1E–02

1E–04

1E–06

1E–08

0.0 0.5

2.5

3.5

4.5

5.5

6.5

7.5

8.5

9.5

10.5

Measurement signal U [V]

Pressure p

8.6

1.397

1E–09

sor

mbar

torr

1.217

rra

p = 10

1.667U-d

⇔

U = c + 0.6 log p

valid in the range 1×10

-9

mbar < p < 1000 mbar

7.5×10

-10

Torr < p < 750 Torr

1×10

-7

Pa < p < 1×10

mbar Pa Torr

c 6.798 5.598 6.873

d 11.33 9.333 11.46

where p pressure

U measurement

signal

c, d constant (pressure unit dependent)