INFICON Gemini ATM to Ultra-High Vacuum Gauge - Manual (Page 19)

tina83e1-a (2014-02) 19
where: Gas type K
Air (N
2
, O
2
, CO) 1.0
Xe 0.4
Kr 0.5
Ar 0.8
H
2
2.4
Ne 4.1
He 5.9
These conversion factors are average values.
A mixture of gases and vapors is often involved. In this
case, accurate determination is only possible with a
partial pressure measurement instrument, e.g. a
quadrupole mass spectrometer.