beautypg.com

2 technical data – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 10

background image

10

tina83e1-a (2014-02)

2 Technical

Data

Measurement range (air, N

2

)

MAG
MPG


1Ч10

-9

… 1Ч10

-2

mbar

1×10

-9

… 1000 mbar

Accuracy MAG (N

2

)

1Ч10

-8

… 1Ч10

-2

mbar

30% of reading

Accuracy MPG (N

2

)

1×10

-8

… 100 mbar

100 … 1000 mbar

30% of reading
50% of reading

Repeatability (N

2

)

MAG, 1Ч10

-8

… 1Ч10

-2

mbar

MPG, 1×10

-8

… 100 mbar


5% of reading
5% of reading

Gas type dependence

MAG
MPG


→  18

→  20

Voltage range (analog output)

0 … +10.5 V

Measurement range

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P


+1.5 … +8.5 V (dc)
+0.667 … +10 V (dc)
+1.398 … +8.6 V (dc)

Voltage vs. pressure

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P


1 V/decade, logarithmic
1.33 V/decade, logarithmic
0.6 V/decade, logarithmic

Status signal

14.5 … 30 V (ignited)

Error signal

3MAx-xxx-0x0N
3MAx-xxx-0x0Q
3MBx-xxx-0x0P


<+0.5 V
≤+0.3 V
+9.5 … +10.5 V

Output impedance

2 × 4.7

Ω, short-circuit proof

Load impedance

≥10 k

Ω, short-circuit proof

Step response time

p > 10

-6

mbar

p = 10

-8

mbar

pressure dependent
<100 ms

1 s