2 cleaning the gauge / replacing parts – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual
Page 40
40
tina83e1-a (2014-02)
Press the
is carried out (duration
≈5 s).
If the pressure value 1×10
-5
mbar is output at the
measurement value output, the adjustment has been
successful. Otherwise, repeat the adjustment proce-
dure.
6.2
Cleaning the Gauge / Replacing Parts
In case of severe contamination or defective (e.g. pirani
filament rupture (MPG50x)), replace the complete
measuring chamber (Spare Parts
→ 53).
DANGER
DANGER: contaminated parts
Contaminated parts can be detrimental to health
and environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant re-
gulations and take the necessary precautions when
handling contaminated parts.
Caution
Caution: vacuum component
Dirt and damages impair the function of the vac-
uum component.
When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent
damages.
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