Intended use, Functional principle – INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual
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tina83e1-a (2014-02)
Intended
Use
Gemini MAG500, MAG504
The Cold Cathode Gauges Gemini MAG500 and MAG504 have
been designed for vacuum measurement of gases in the
pressure range of 1Ч10
-9
… 1Ч10
-2
mbar.
The gauges with PN 3MAx-xxx-0x0Q can be operated in
connection with an INFICON Vacuum Gauge Controller of the
VGC40x series.
Gemini MPG500, MPG504
The Cold Cathode Gauges Gemini MPG500 and MPG504 have
been designed for vacuum measurement of gases in the
pressure range of 1×10
-9
… 1000 mbar.
They must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen)
within the explosion range.
The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller of the VGC40x series.
Functional
Principle
Gemini MAG500, MAG504
The gauge functions with a cold cathode ionization measure-
ment circuit (according to the inverted magnetron principle).
Over the whole measurement range, the measuring signal is
output as a logarithm of the pressure.
Gemini MPG500, MPG504
The gauge consists of two separate measuring systems (the
Pirani and the cold cathode system according to the inverted
magnetron principle). They are combined in such a way that for
the user, they behave like one measuring system.