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INFICON Gemini ATM to Ultra-High Vacuum Gauge User Manual

Page 35

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tina83e1-a (2014-02)

35

Contamination can to a certain extent be reduced by:
• geometric protection (e.g. screenings, elbows) against parti-

cles that spread rectilinearly

• mounting the flange of the gauge at a place where the partial

pressure of the pollutants is particularly low.

Special precautions are required for vapors deposited under
plasma (of the cold cathode measuring system). While vapors
occur it may even be necessary
• to temporarily switch of the gauge
• to temporarily seal off of the gauge from the vacuum chamber

using a valve.