INFICON BCG450 ATM to Ultra-High Vacuum Triple Gauge - Manual (Page 8)

8
tina40e1-b (2011-04)
2 Technical Data
Pressure range
10 … 1500 mbar capacitance diaphragm sensor
1 … 10 mbar crossover range
2×10 -2 … 1 mbar Pirani sensor
5Ч10 -3 … 2Ч10 -2 mbar crossover range
5Ч10 -10 … 5Ч10 -3 mbar hot cathode ionisation (BA)
Range (air, O
2,
CO, N
2
) 5×10 -10 … 1500 mbar, continuous
Accuracy
1×10 -8 … 50 mbar ±15% of reading
50 … 950 mbar ±5% of reading
950 … 1050 mbar ±2.5% of reading
(after 10 min. stabilisation)
Repeatability
5% of reading, 10 -8 … 10 -2 mbar
(after 10 min. stabilisation)
Gas type dependence → Appendix B
Switching on threshold
Switching off threshold 2.4×10 -2 mbar
3.2×10 -2 mbar
Emission current
p ≤7.2×10 -6 mbar
7.2×10 -6 mbar < p < 3.2×10 -2 mbar
5 mA
25 µA
Emission current switching
25 µA ⇒ 5 mA
5 mA ⇒ 25 µA
7.2×10
-6 mbar
3.0×10 -5 mbar
Degas emission current
(p <7.2×10
-6 mbar)
≈20 mA (P
degas
≈4 W)
Control input signal 0 V/+24 VDC, active high
(control via RS232
→ 33)
Duration max. 3 min, followed by automatic stop
A new degas cycle can only be started
after a waiting time of 30 minutes.
In degas mode, BCG450 gauges keep supplying measurement values, however
their tolerances may be higher than during normal operation.
Output signal (measuring signal) 0 … +10.13 V
Measuring range 0.774 … +10.13 V
(5×10
-10 mbar … 1500 mbar
Relationship voltage-pressure logarithmic, 0.75 V/decade
(
→ Appendix A)
Error signal +0.1 V Diaphragm sensor or
EEPROM
error
+0.3 V BA sensor error
+0.5 V Pirani sensor error
(
→ 47)
Minimum load impedance 10 k Ω
Measurement principle
Measuring range
Emission
Degas
Output signal